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SRAM Performance Variations Induced by Source/Drain Mole Fraction Change of Sub 5-nm Node Silicon Nanosheet Field-Effect Transistors

Title
SRAM Performance Variations Induced by Source/Drain Mole Fraction Change of Sub 5-nm Node Silicon Nanosheet Field-Effect Transistors
Authors
LEE, JUNJONGYOON, JUN SIKJEONG, JINSULEE, SEUNGHWANBAEK, ROCK HYUN
Date Issued
2020-07-01
Publisher
NANO KOREA
URI
https://oasis.postech.ac.kr/handle/2014.oak/106216
Article Type
Conference
Citation
The 18th International Nanotech Symposium & Exhibition, 2020-07-01
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백록현BAEK, ROCK HYUN
Dept of Electrical Enginrg
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