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Smooth and Large Scale Organometallic Complex Thin Film Prepared by Vapor Phase Ligand Substitution Reaction

Title
Smooth and Large Scale Organometallic Complex Thin Film Prepared by Vapor Phase Ligand Substitution Reaction
Authors
CHOI, HEE CHEULCHOE, MYEONG GEUN
Date Issued
2021-01-28
Publisher
삼성, 한국반도체산업협회, 한국반도체연구조합
URI
https://oasis.postech.ac.kr/handle/2014.oak/105318
Article Type
Conference
Citation
제 28회 한국반도체 학술대회, 2021-01-28
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