Structural analysis of thin films of novel polynorbornene derivatives by grazing incidence X-ray scattering and specular X-ray reflectivity along with ellipsometry

Abstract

In the present study, structural analyses using synchrotron grazing incidence X-ray scattering, specular reflectivity and ellipsometry were performed on thin films of two novel polynorbornene derivatives, chiral poly( norbornene acid methyl ester) and racemic poly(norbornene acid n-butyl ester), which are potential low dielectric constant materials for advanced microelectronic and display applications. These analyses provided important information on the structure, electron density gradient across the film thickness, chain orientation, refractive index and thermal expansion characteristics of the polymers in substrate-supported thin films. The structural characteristics and properties of the thin films depended on the tacticity of the polymer chain and were further influenced by the film thickness and thermal annealing history.