Synchrotron X-ray reflectivity studies of nanoporous organosilicate thin films with low dielectric constants
- Title
- Synchrotron X-ray reflectivity studies of nanoporous organosilicate thin films with low dielectric constants
- Authors
- Oh, W; Hwang, Y; Shin, TJ; Lee, B; Kim, JS; Yoon, J; Brennan, S; Mehta, A; Ree, M
- POSTECH Authors
- Ree, M
- Date Issued
- Jan-2007
- Publisher
- BLACKWELL PUBLISHING
- URI
- http://oasis.postech.ac.kr/handle/2014.oak/10425
- DOI
- 10.1107/S00218898060
- ISSN
- 0021-8898
- Article Type
- Article
- Citation
- JOURNAL OF APPLIED CRYSTALLOGRAPHY, vol. 40, 2007-01
- Files in This Item:
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