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Synchrotron X-ray reflectivity studies of nanoporous organosilicate thin films with low dielectric constants

Title
Synchrotron X-ray reflectivity studies of nanoporous organosilicate thin films with low dielectric constants
Authors
Oh, WHwang, YShin, TJLee, BKim, JSYoon, JBrennan, SMehta, ARee, M
POSTECH Authors
Ree, M
Date Issued
Jan-2007
Publisher
BLACKWELL PUBLISHING
URI
http://oasis.postech.ac.kr/handle/2014.oak/10425
DOI
10.1107/S00218898060
ISSN
0021-8898
Article Type
Article
Citation
JOURNAL OF APPLIED CRYSTALLOGRAPHY, vol. 40, 2007-01
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이문호REE, MOONHOR
Dept of Chemistry
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