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MICROELECTRONIC ENGINEERING, vol. 129, page. 5 - 11, 2014-11-05

Sensors and Actuators A: Physical, vol. 166, no. 2, page. 234 - 240, 2011-04

MICROELECTRONIC ENGINEERING, vol. 88, no. 3, page. 276 - 281, 2011-03

SENSORS AND ACTUATORS A-PHYSICAL, vol. 159, no. 1, page. 51 - 57, 2010-04

Journal of Sensor Science and Technology, vol. 21, no. 2, page. 114 - 120, 2012-03

Applied Physics Letters, vol. 104, no. 16, page. 161608, 2014-04-21

Journal of Micromechanics and Microengineering, vol. 23, no. 5, page. 55006 - 55006, 2013-05