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Browsing by AuthorSANGUK, LEE
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Showing results 1 to 1 of 1
Conference
Optimization of Ge Mole Fraction in Sacrificial Layers for Sub-3-nm Node Silicon Nanosheet FETs
The 7th Electron Devices Technology and Manufacturing Conference (IEEE EDTM 2023), 2023-03-09
BAEK, ROCK HYUN
;
SANGUK, LEE
;
JINSU, JEONG
;
윤준식
;
LEE, JUNJONG
;
et al
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