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AVS 7th International Conference on Atomic Layer Deposition, page. 130
2007년도 한국 재료 학회 추계 학술 발표대회
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IUVSTA ECM-100 special symposium
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AVS 5th International Conference on Atomic Layer Deposition
제 2회 반도체공정 진단 Workshop, page. 119
AVS 5th International Conference on Atomic Layer Deposition
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Proc. of the 13th Int. Conf. on CVD, page. 189, 1996-01-01
GJ-NST 2009, 2009-11-05
ALD2010, 2010-06-20