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LEE, JIN WON(이진원)
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Dept of Mechanical Engineering(기계공학과)
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Publication & Time Cited Count (For the Last 5 years)
Results 1-1 of 1 (Search time: 0.0 seconds).
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Date issued
2012
1
Type
Article
1
Subject
ano-bullet
1
BEAM
1
Cleaning efficiency
1
CO2
1
CONTOURED LAVAL NOZZLE
1
DYNAMICS
1
Gas-phase nucleation
1
Nano-bullet
1
SUPERSONIC EXPANSION
1
Supersonic nozzle
1
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SCIE
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SCOPUS
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: DYNAMICS
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: BEAM
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: CONTOURED LAVAL NOZZLE
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: DYNAMICS
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Article
Removal of 10-nm contaminant particles from Si wafers using CO2 bullet particles
SCIE
SCOPUS
NANOSCALE RESEARCH LETTERS, vol. 7, no. 1, 2012-04-11
Inho Kim
;
Kwang-seok Hwang
;
Lee, J
1
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