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LEE, JIN WON(이진원)
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Dept of Mechanical Engineering(기계공학과)
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Publication & Time Cited Count (For the Last 5 years)
Results 1-1 of 1 (Search time: 0.001 seconds).
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Date issued
2011
1
Type
Article
1
Subject
BEAM
1
Cleaning efficiency
1
CONTOURED LAVAL NOZZLE
1
Gas-phase nucleation
1
Homogeneous nucleation
1
Nano-bullet
1
Semiconductors
1
SUPERSONIC EXPANSION
1
Supersonic nozzle
1
Surface science
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SCIE
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SCOPUS
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Date Issued
: 2011
Journal Registered
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Subject
: SUPERSONIC EXPANSION
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Article
Removal of 10-nm contaminant particles from Si wafers using argon bullet particles
SCIE
SCOPUS
JOURNAL OF NANOPARTICLE RESEARCH, vol. 13, no. 10, page. 4979 - 4986, 2011-10
Hwang, KS
;
Lee, KH
;
Kim, IH
;
Lee, JW
1
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