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Publication & Time Cited Count (For the Last 5 years)
Results 21-21 of 21 (Search time: 0.001 seconds).
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Date issued
2010 - 2017
11
2004 - 2009
10
Type
Article
21
Subject
THIN-FILMS
21
OXIDE
5
GATE DIELECTRICS
4
GROWTH
4
HAFNIUM
4
ATOMIC LAYER DEPOSITION
3
CHEMICAL-VAPOR-DEPOSITION
3
DEPOSITION
3
NANOWIRES
3
SOLAR-CELLS
3
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Journal Registered
SCIE
21
SCOPUS
21
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Author
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Subject
: THIN-FILMS
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Conference Papers(Domestic)
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Article
Characterization of zirconium silicate gate dielectrics deposited on si(100) using Zr(NEt2)(4) and Si((OBu)-Bu-n)(4)
SCIE
SCOPUS
ELECTROCHEMICAL AND SOLID STATE LETTERS, vol. 7, no. 5, page. F35 - F37, 2004-03
Kim, J
;
Yong, KJ
1
2
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