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YONG, KIJUNG(용기중)
scopus
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Dept. of Chemical Engineering(화학공학과)
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Date issued
2002
1
Type
Article
1
Subject
atomic layer chemical vapor depos...
1
capacitor dielectric thin film
1
DIELECTRIC-PROPERTIES
1
EPITAXY GROWTH
1
gate oxide
1
IN-SITU
1
METAL-OXIDES
1
nano-deposition
1
NIOBIUM OXIDE
1
OPTICAL-PROPERTIES
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KCI
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SCIE
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Subject
: atomic layer chemical vapor deposition
Subject
: nano-deposition
Date Issued
: 2002
Subject
: gate oxide
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Article
Applications of atomic layer chemical vapor deposition for the processing of nanolaminate structures
SCIE
SCOPUS
KCI
KOREAN JOURNAL OF CHEMICAL ENGINEERING, vol. 19, no. 3, page. 451 - 462, 2002-05
Yong, K
;
Jeong, J
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