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YONG, KIJUNG(용기중)
scopus
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Dept. of Chemical Engineering(화학공학과)
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Publication & Time Cited Count (For the Last 5 years)
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2006
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Article
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: Jeon, S
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Date Issued
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: scie
Subject
: DIFFUSION
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Article
Thermal stability of chemical vapor deposition grown W and WNx thin films in low-k integration structure
SCIE
SCOPUS
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, vol. 24, no. 3, page. 1428 - 1431, 2006-05
Jeon, S
;
Yong, K
;
Park, SG
;
Rhee, SW
1
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