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YONG, KIJUNG(용기중)
scopus
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Dept. of Chemical Engineering(화학공학과)
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Publication & Time Cited Count (For the Last 5 years)
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Date issued
2002
1
Type
Article
1
Subject
ELECTRICAL CHARACTERISTICS
1
METAL ALKOXIDES
1
MOCVD
1
OXIDES
1
OXYGEN
1
SILICON
1
ZIRCONIUM
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SCIE
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SCOPUS
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Applied search limites :
Author
: Rhee, SW
Date Issued
: [2002 TO 2009]
Date Issued
: 2002
Subject
: SILICON
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Article
Direct liquid injection metallorganic chemical vapor deposition of ZrO2 thin films using Zr(dmae)(4) as a novel precursor
SCIE
SCOPUS
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 149, no. 1, page. C23 - C27, 2002-01
Na, JS
;
Kim, DH
;
Yong, K
;
Rhee, SW
1
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