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KIM, HYUNGJUN(김형준)
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Dept of Materials Science & Engineering(신소재공학과)
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Publication & Time Cited Count (For the Last 5 years)
Results 1-1 of 1 (Search time: 0.001 seconds).
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Date issued
2009
1
Type
Article
1
Subject
Atomic layer deposition
1
CHEMICAL-VAPOR-DEPOSITION
1
Effects of growth temperature
1
Effects of oxygen exposure
1
ELECTRODE
1
Films properties
1
Growth characteristics
1
MECHANISM
1
METAL
1
Phase control
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KCI
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SCIE
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SCOPUS
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Subject
: CHEMICAL-VAPOR-DEPOSITION
Date Issued
: 2009
Date Issued
: 2009
Subject
: METAL
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Article
ATOMIC LAYER DEPOSITION OF RUTHENIUM AND RUTHENIUM-OXIDE THIN FILMS BY USING A RU(ETCP)(2) PRECURSOR AND OXYGEN GAS
SCIE
SCOPUS
KCI
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, vol. 55, no. 1, page. 32 - 37, 2009-07
Kim, WH
;
Park, SJ
;
Kim, DY
;
Kim, H
1
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