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REE, MOONHOR(이문호)
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Dept of Chemistry(화학과)
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Date issued
2015
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Article
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CHEMICAL-MECHANICAL PLANARIZATION
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CONSTANT MATERIALS
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DAMAGE
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EVOLUTION
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HARD-SPHERE INTERACTIONS
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REFLECTION
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THIN-FILMS
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X-RAY-SCATTERING
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SCIE
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: X-RAY-SCATTERING
Date Issued
: 2015
Date Issued
: 2015
Subject
: CHEMICAL-MECHANICAL PLANARIZATION
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Article
Structural reliability evaluation of low-k nanoporous dielectric interlayers integrated into microelectronic devices
SCIE
SCOPUS
RSC ADVANCES, vol. 5, no. 106, page. 87084 - 87089, 2015-01
Heo, K
;
Ree, BJ
;
Choi, KK
;
Ree, M
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