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KANG, BONG KOO(강봉구)
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Dept of Electrical Engineering(전자전기공학과)
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Publication & Time Cited Count (For the Last 5 years)
Results 1-1 of 1 (Search time: 0.0 seconds).
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Date issued
2000
1
Type
Article
1
Subject
helical resonator
1
inductive coupled plasma
1
plasma source
1
radio frequency (RF) heating
1
RESONATOR DISCHARGE
1
Journal Registered
SCIE
1
SCOPUS
1
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Date Issued
: 2000
Subject
: inductive coupled plasma
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Article
Properties of inductively coupled plasma source with helical coil
SCIE
SCOPUS
IEEE TRANSACTIONS ON PLASMA SCIENCE, vol. 28, no. 2, page. 403 - 413, 2000-04
Park, JC
;
Lee, JK
;
Kang, B
1
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