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PARK, JAE SUNG(박재성)
scopus
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Dept of Mechanical Engineering(기계공학과)
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Publication & Time Cited Count (For the Last 5 years)
Results 1-1 of 1 (Search time: 0.0 seconds).
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Date issued
2003
1
Type
Article
1
Subject
dissolved wafer process
1
liquid encapsulation
1
pressure sensor
1
servo-controller
1
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SCIE
1
SCOPUS
1
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: [2000 TO 2009]
Date Issued
: 2003
Subject
: servo-controller
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Article
A servo-controlled capacitive pressure sensor using a capped-cylinder structure microfabricated by a three-mask process
SCIE
SCOPUS
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol. 12, no. 2, page. 209 - 220, 2003-04
Park, JS
;
Gianch
;
ani, YB
1
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