Conference
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | MOON, WON KYU | - |
| dc.contributor.author | 이훈택 | - |
| dc.contributor.author | 신금재 | - |
| dc.date.accessioned | 2019-04-08T08:16:50Z | - |
| dc.date.available | 2019-04-08T08:16:50Z | - |
| dc.date.created | 2019-03-06 | - |
| dc.date.issued | 2018-04-05 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/98269 | - |
| dc.language | Korean | - |
| dc.publisher | 마이크로나노시스템학회 | - |
| dc.relation.isPartOf | 제20회 한국 MEMS 학술대회 | - |
| dc.relation.isPartOf | 제20회 한국 MEMS 학술대회 논문집 | - |
| dc.title | FET 기반 주사탐침을 이용한 Si 기판의 이온 손상 특성 해석 | - |
| dc.title.alternative | Application of FET-based Scanning Probe: Characterization of ion damage in Si | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.identifier.bibliographicCitation | 제20회 한국 MEMS 학술대회 | - |
| dc.citation.conferenceDate | 2018-04-05 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferencePlace | 제주KAL호텔 | - |
| dc.citation.title | 제20회 한국 MEMS 학술대회 | - |
| dc.contributor.affiliatedAuthor | MOON, WON KYU | - |
| dc.contributor.affiliatedAuthor | 이훈택 | - |
| dc.description.journalClass | 2 | - |
| dc.description.journalClass | 2 | - |
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