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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김형준 | - |
| dc.date.accessioned | 2018-06-21T15:05:30Z | - |
| dc.date.available | 2018-06-21T15:05:30Z | - |
| dc.date.created | 2009-03-27 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/83927 | - |
| dc.relation.isPartOf | 1st International Conference on Microelectronics and Plasma Technology | - |
| dc.relation.isPartOf | 1st International Conference on Microelectronics and Plasma Technology | - |
| dc.title | Cobalt Atomic Layer Deposition for Nanoscale Contact Applications | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.identifier.bibliographicCitation | 1st International Conference on Microelectronics and Plasma Technology | - |
| dc.citation.conferenceDate | 2008-08-01 | - |
| dc.citation.title | 1st International Conference on Microelectronics and Plasma Technology | - |
| dc.contributor.affiliatedAuthor | 김형준 | - |
| dc.description.journalClass | 1 | - |
| dc.description.journalClass | 1 | - |
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg