Full metadata record
DC Field | Value | Language |
dc.contributor.author | 용기중 | - |
dc.date.accessioned | 2018-06-21T04:06:51Z | - |
dc.date.available | 2018-06-21T04:06:51Z | - |
dc.date.created | 2009-03-27 | - |
dc.date.issued | 2003-05-02 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/73992 | - |
dc.relation.isPartOf | ECS 2003 Fall Meeting/CVD XVI and EuroCVD14 | - |
dc.relation.isPartOf | ECS 2003 Fall Meeting/CVD XVI and EuroCVD14 | - |
dc.title | Low temperature Cu thin film growth using cycles of alternate supply of (hfac)Cu(DMB) and Ar purge gas | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.identifier.bibliographicCitation | ECS 2003 Fall Meeting/CVD XVI and EuroCVD14 | - |
dc.citation.title | ECS 2003 Fall Meeting/CVD XVI and EuroCVD14 | - |
dc.contributor.affiliatedAuthor | 용기중 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
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