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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이진원 | - |
| dc.contributor.author | 최민석 | - |
| dc.date.accessioned | 2018-06-18T06:28:34Z | - |
| dc.date.available | 2018-06-18T06:28:34Z | - |
| dc.date.created | 2013-03-07 | - |
| dc.date.issued | 2012-06-20 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/63068 | - |
| dc.publisher | NanoTech | - |
| dc.relation.isPartOf | NanoTech 2012 | - |
| dc.title | MD simulations on the momentum transfer to nano contaminant particle on wafer surface in collisions with cleaning bullets | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.identifier.bibliographicCitation | NanoTech 2012 | - |
| dc.citation.conferencePlace | US | - |
| dc.citation.title | NanoTech 2012 | - |
| dc.contributor.affiliatedAuthor | 이진원 | - |
| dc.description.journalClass | 1 | - |
| dc.description.journalClass | 1 | - |
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Related Researcher
- 이진원LEE, JIN WON
- Dept of Mechanical Enginrg