Conference
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김준원 | - |
| dc.contributor.author | 박우성 | - |
| dc.contributor.author | 백승범 | - |
| dc.contributor.author | 이진승 | - |
| dc.contributor.author | 안준은 | - |
| dc.contributor.author | 임재욱 | - |
| dc.date.accessioned | 2018-06-18T04:54:22Z | - |
| dc.date.available | 2018-06-18T04:54:22Z | - |
| dc.date.created | 2012-04-23 | - |
| dc.date.issued | 2012-04-07 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/61449 | - |
| dc.publisher | 마이크로나노시스템학회 | - |
| dc.relation.isPartOf | The 14th Korean MEMS Conference | - |
| dc.relation.isPartOf | KMEMS 2012 | - |
| dc.title | 고품질 단결정 실리콘 현수 구조물 제작 기술 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.identifier.bibliographicCitation | The 14th Korean MEMS Conference | - |
| dc.citation.conferenceDate | 2012-04-05 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.title | The 14th Korean MEMS Conference | - |
| dc.contributor.affiliatedAuthor | 김준원 | - |
| dc.contributor.affiliatedAuthor | 박우성 | - |
| dc.contributor.affiliatedAuthor | 백승범 | - |
| dc.description.journalClass | 2 | - |
| dc.description.journalClass | 2 | - |
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