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Browsing "Department of Chemical Engineering (화학공학과)" by Subjecthafnium silicate

전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하

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Showing results 1 to 3 of 3

Article

Growth and characterization of Hf-silicate/Al2O3 gate stacks grown on Si(100) by self-limiting atomic layer depositionSCIESCOPUS

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, vol. 45, no. 9A, page. 7080 - 7083, 2006-09

Article

Highly conformal hafnium silicate film growth by atomic-layer chemical vapor deposition using a new combination of precursors: Hf(OC(CH3)(3))(4) and Si(N(CH3)(C2H5))(4)SCIESCOPUS

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, vol. 45, no. 6A, page. 5174 - 5177, 2006-06

Article

Low-Voltage Bendable Pentacene Thin-Film Transistor with Stainless Steel Substrate and Polystyrene-Coated Hafnium Silicate DielectricSCIESCOPUS

ACS Applied Materials & Interfaces, vol. 4, no. 4, page. 2025 - 2032, 2012-04

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