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Article
Analytic model of S/D series resistance in trigate finfets with polygonal epitaxy
SCIE
SCOPUS
IEEE TRANSACTONS ON ELECTRON DEVICES, vol. 60, no. 4, page. 1302 - 1309, 2013-04
Chang-Woo Sohn
;
Chang Yong Kang
;
Myung-Dong Ko
;
Do-Young Choi
;
Hyun Chul Sagong
;
Eui-Young Jeong
;
Park, CH
;
Sang-Hyun Lee
;
Ye-Ram Kim
;
Chang-Ki Baek
;
Jeong-Soo Lee
;
Jack C. Lee
;
Jeong, YH
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Contact resistance
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epitaxial growth
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fin field-effect transistor (FinFET)
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LOGIC TECHNOLOGY
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multiple-gate
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polygonal shape
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raised source drain
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series resistance
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TRANSISTORS
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transmission line model
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