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Article
A Layout- and Data-Driven Generic Simulation Model for Semiconductor Fabs
SCIE
SCOPUS
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, vol. 22, no. 2, page. 225 - 231, 2009-05
Kim, BI
;
Jeong, S
;
Shin, J
;
Koo, J
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Chae, J
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Lee, S
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generic simulation model
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