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Article
Precise Temperature control and rapid thermal cycling in a micromachined DNA polymerase chain reaction chipSCIESCOPUS

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 12, no. 6, page. 813 - 823, 2002-11

Article
Fabrication of Thick Silicon Dioxide Air-Bridge for RF ApplicationSCIESCOPUS

JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 41, no. 6B, page. 4362 - 4365, 2002-06

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