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Article
Supercritical Fluid Deposition of Conformal SrTiO3 Films with Composition Uniformity in Nanocontact Holes
SCIE
SCOPUS
ELECTROCHEMICAL AND SOLID STATE LETTERS, vol. 12, no. 5, page. D45 - D47, 2009-01
Lee, JH
;
Son, JY
;
Lee, HBR
;
Lee, HS
;
Ma, DJ
;
Lee, CS
;
Kim, HJ
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ATOMIC LAYER DEPOSITION
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BARIUM STRONTIUM-TITANATE
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CAPACITOR HOLE
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capacitors
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CARBON-DIOXIDE
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dielectric thin films
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liquid phase deposition
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