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Article
Role of amorphous Si3N4 in the microhardness of Ti-Al-Si-N nanocomposite films
SCIE
SCOPUS
KCI
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, vol. 42, no. 6, page. 783 - 786, 2003-06
Park, IW
;
Kim, KH
;
Suh, JH
;
Park, CG
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amorphous Si3N4
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