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Browsing "Department of Materials Science & Engineering (신소재공학과)" by Subjectin situ nitridation

전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하

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Comparative studies of atomic layer deposition and plasma-enhanced atomic layer deposition Ta2O5 and the effects on electrical properties of in situ nitridationSCIESCOPUS

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, vol. 46, no. 5B, page. 3224 - 3228, 2007-05

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