Fabrication of Microchannel Containing Nanopillar Arrays using Micromachined AAO (Anodic Aluminum Oxide) Mold

Abstract

In this paper, we present a novel low cost fabrication method of a microchannel containing nanopillar arrays based on the soft lithographical replication of PDMS (polydimethylsiloxane) using a micromachined AAO (anodic aluminum oxide) master mold without any photolithographic processes. The micromachined AAO master mold was fabricated by combining the two-step anodization, micro-endmilling and the subsequent electropolishing processes, thereby having a nanoporous alumina layer on top of the micro-end-milled microchannel positive relief. Large numbers of the same microchannel with nanopillar arrays were finally realized by the PDMS replica molding from the micromachined AAO mold. The microchannel with nanopillar arrays fabricated in this study could be applied to various integrated biological, chemical or optical devices. (c) 2007 Elsevier B.V. All rights reserved.