DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, DR | - |
dc.contributor.author | Park, YJ | - |
dc.contributor.author | Jeong, YH | - |
dc.contributor.author | Lee, KB | - |
dc.contributor.author | Takenaka, H | - |
dc.date.accessioned | 2017-07-19T06:43:30Z | - |
dc.date.available | 2017-07-19T06:43:30Z | - |
dc.date.created | 2009-02-28 | - |
dc.date.issued | 1999-01 | - |
dc.identifier.issn | 0021-4922 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/33779 | - |
dc.description.abstract | Diffuse x-ray reflectivity intensities mere measured to characterize interface morphologies of Mo/Si multilayers with and without interleaved carbon thin layers. Parameters related to the interface morphologies can be obtained by fitting the measured intensities within the distorted wave Born approximation in such a way that intermixing widths of graded interfaces, correlated interface roughness amplitudes and vertical correlation lengths are obtained. The interface parameters of Mo/Si and Mo/C/Si/C multilayers are compared for as-grown samples and annealed ones. | - |
dc.language | English | - |
dc.publisher | JAPAN J APPLIED PHYSICS | - |
dc.relation.isPartOf | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | - |
dc.subject | Mo/Si multilayer | - |
dc.subject | carbon barrier | - |
dc.subject | diffuse x-ray reflectivity | - |
dc.subject | correlated roughness | - |
dc.subject | SCATTERING | - |
dc.subject | MIRRORS | - |
dc.subject | LAYERS | - |
dc.subject | FILMS | - |
dc.title | Diffuse x-ray reflectivity study of interface roughness in Mo/Si multilayers | - |
dc.type | Article | - |
dc.identifier.doi | 10.7567/JJAPS.38S1.285 | - |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.38, pp.285 - 288 | - |
dc.identifier.wosid | 000082804000071 | - |
dc.date.tcdate | 2018-03-23 | - |
dc.citation.endPage | 288 | - |
dc.citation.startPage | 285 | - |
dc.citation.title | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | - |
dc.citation.volume | 38 | - |
dc.contributor.affiliatedAuthor | Jeong, YH | - |
dc.contributor.affiliatedAuthor | Lee, KB | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
dc.description.wostc | 0 | - |
dc.type.docType | Article; Proceedings Paper | - |
dc.subject.keywordPlus | SCATTERING | - |
dc.subject.keywordPlus | MIRRORS | - |
dc.subject.keywordPlus | LAYERS | - |
dc.subject.keywordPlus | FILMS | - |
dc.subject.keywordAuthor | Mo/Si multilayer | - |
dc.subject.keywordAuthor | carbon barrier | - |
dc.subject.keywordAuthor | diffuse x-ray reflectivity | - |
dc.subject.keywordAuthor | correlated roughness | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Physics | - |
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