Full metadata record
DC Field | Value | Language |
dc.contributor.author | 최희석 | en_US |
dc.date.accessioned | 2015-02-24T13:09:41Z | - |
dc.date.available | 2015-02-24T13:09:41Z | - |
dc.date.issued | 1993 | en_US |
dc.identifier.other | OAK-2015-00621 | en_US |
dc.identifier.uri | http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001897771 | en_US |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/3001 | - |
dc.description | Master | en_US |
dc.language | kor | en_US |
dc.publisher | 포항공과대학교 | en_US |
dc.rights | BY_NC_ND | en_US |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/2.0/kr | en_US |
dc.title | 텅스텐의 저압 화학증착에서 운반기체의 영향 | en_US |
dc.title.alternative | The Effecof Carrier Gases in the LPCVD Tungsten Process | en_US |
dc.type | Thesis | en_US |
dc.contributor.college | 일반대학원 화학공학과 | en_US |
dc.date.degree | 1993-02 | en_US |
dc.type.docType | Thesis | - |
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.