DC Field | Value | Language |
---|---|---|
dc.contributor.author | BAEK, ROCK HYUN | - |
dc.contributor.author | 이상욱 | - |
dc.contributor.author | 정진수 | - |
dc.contributor.author | 이승환 | - |
dc.contributor.author | S. Lee | - |
dc.contributor.author | 임재완 | - |
dc.contributor.author | S. C. Song | - |
dc.contributor.author | S. Ekbote | - |
dc.contributor.author | N. Stevens-Yu | - |
dc.contributor.author | D. Greenlaw | - |
dc.date.accessioned | 2024-01-23T00:26:11Z | - |
dc.date.available | 2024-01-23T00:26:11Z | - |
dc.date.created | 2023-12-19 | - |
dc.date.issued | 2023-09-08 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/119823 | - |
dc.language | English | - |
dc.publisher | 2023 SSDM | - |
dc.relation.isPartOf | 2023 International Conference on Solid State Devices and Materials (SSDM) | - |
dc.title | Channel Trimming Process to Improve Electro-thermal Characteristics for Sub-3-nm Node Nanosheet Field-Effect Transistors with Laser Spike Annealing | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.identifier.bibliographicCitation | 2023 International Conference on Solid State Devices and Materials (SSDM) | - |
dc.citation.conferenceDate | 2023-09-05 | - |
dc.citation.conferencePlace | JA | - |
dc.citation.title | 2023 International Conference on Solid State Devices and Materials (SSDM) | - |
dc.contributor.affiliatedAuthor | BAEK, ROCK HYUN | - |
dc.contributor.affiliatedAuthor | 이상욱 | - |
dc.contributor.affiliatedAuthor | 정진수 | - |
dc.contributor.affiliatedAuthor | 이승환 | - |
dc.contributor.affiliatedAuthor | 임재완 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
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