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Browsing by  AuthorPark, WT
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Showing results 1 to 2 of 2
Article
A study of the role of various reactions on the density distribution of hydrogen, silylene, and silyl in SiH4/H-2 plasma discharges
SCIE
SCOPUS
PHYSICS OF PLASMAS, vol. 18, no. 9, 2011-09
Aman-ur-Rehman
;
Kwon, HC
;
Park, WT
;
Lee, JK
Article
Negative resistance phenomenon in dual-frequency capacitively coupled plasma-enhanced chemical vapor deposition system for photovoltaic manufacturing process
SCIE
SCOPUS
JOURNAL OF APPLIED PHYSICS, vol. 111, no. 2, 2012-01-15
Kwon, HC
;
Aman-ur-Rehman
;
Won, IH
;
Park, WT
;
Lee, JK
1
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