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Browsing by  AuthorChoi, CK
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Showing results 1 to 1 of 1
Article
Synchrotron X-ray scattering and reflectivity studies of the structure of low dielectric constant SiOCH thin films prepared from bistrimethylsilylmethane by chemical vapor deposition
SCIE
SCOPUS
JOURNAL OF APPLIED CRYSTALLOGRAPHY, vol. 40, page. S614 - S619, 2007-04
Heo, K
;
Oh, KS
;
Yoon, J
;
Jin, KS
;
Jin, S
;
et al
1
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