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Browsing by  AuthorYun, JH

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Showing results 10 to 12 of 12
Article
Simplified simulation of step coverage in chemical vapor deposition with a hemispherical vapor source modelSCIESCOPUS

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 144, no. 5, page. 1803 - 1807, 1997-05

Article
Surface passivation technique for selective hole filling by chemical vapor depositionSCIESCOPUS

JOURNAL OF MATERIALS SCIENCE LETTERS, vol. 17, no. 11, page. 947 - 949, 1998-06-01

Article
The effect of additives on the viscosity of dimethylaluminum hydride and FTIR diagnostics of the gas-phase reactionSCIESCOPUS

THIN SOLID FILMS, vol. 348, no. 1-2, page. 130 - 133, 1999-07-06

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