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YONG, KIJUNG(용기중)
scopus
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Dept. of Chemical Engineering(화학공학과)
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Date issued
2009
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Article
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CHEMICAL-VAPOR-DEPOSITION
1
FABRICATION
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FIELD-EFFECT TRANSISTORS
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GATE DIELECTRICS
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GROWTH
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INSULATOR
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LOW-VOLTAGE
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METAL ALKOXIDES
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: FIELD-EFFECT TRANSISTORS
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: PRECURSORS
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Article
Atomic layer deposition of hafnium silicate film for high mobility pentacene thin film transistor applications
SCIE
SCOPUS
JOURNAL OF MATERIALS CHEMISTRY, vol. 19, no. 37, page. 6857 - 6864, 2009-07
Lee, S
;
Yun, DJ
;
Rhee, SW
;
Yong, K
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