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KIM, HYUNGJUN(김형준)
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Dept of Materials Science & Engineering(신소재공학과)
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Publication & Time Cited Count (For the Last 5 years)
Results 1-1 of 1 (Search time: 0.001 seconds).
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Date issued
2008
1
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Article
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DIELECTRICS
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METAL
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NANOTUBES
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RUTHENIUM THIN-FILMS
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: SILICON
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: DIELECTRICS
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: scopus
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: LITHOGRAPHY
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: SILICON
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Article
Ru nanostructure fabrication using an anodic aluminum oxide nanotemplate and highly conformal Ru atomic layer deposition
SCIE
SCOPUS
NANOTECHNOLOGY, vol. 19, no. 4, 2008-01-30
Kim, WH
;
Park, SJ
;
Son, JY
;
Kim, H
1
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