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Observation of inductively coupled-plasma-induced damage on n-type GaN using deep-level transient spectroscopy
- Title
- Observation of inductively coupled-plasma-induced damage on n-type GaN using deep-level transient spectroscopy
- POSTECH Authors
- Lee, JL
- Date Issued
- Jan-2003
- Publisher
- AMER INST PHYSICS
- ISSN
- 0003-6951
- Article Type
- Article
- Citation
- APPLIED PHYSICS LETTERS, vol. 82, no. 8, page. 1233 - 1235, 2003-01
- Files in This Item:
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Related Researcher
- 이종람LEE, JONG LAM
- Dept of Materials Science & Enginrg