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Reaction of Co and capping layers and its effect on CoSi2 formation in Si/SiOx/Co system

Title
Reaction of Co and capping layers and its effect on CoSi2 formation in Si/SiOx/Co system
Authors
Kim, GBKwak, JSBaik, HKLee, SMOh, SHPark, CG
POSTECH Authors
Park, CG
Date Issued
Jan-2000
Publisher
AMER INST PHYSICS
URI
http://oasis.postech.ac.kr/handle/2014.oak/9396
ISSN
0003-6951
Article Type
Article
Citation
APPLIED PHYSICS LETTERS, vol. 77, no. 10, page. 1443 - 1445, 2000-01
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박찬경PARK, CHAN GYUNG
Dept of Materials Science & Enginrg
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