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Using E-Beam and X-Ray Lithography Techniques to Fabricate Zone Plates for Hard X-ray

Title
Using E-Beam and X-Ray Lithography Techniques to Fabricate Zone Plates for Hard X-ray
Authors
제정호
POSTECH Authors
제정호
Publisher
AIP
URI
https://oasis.postech.ac.kr/handle/2014.oak/91312
Article Type
Conference
Citation
AIP Conference Proceedings: Synchrotron Radiation Instrumentation: Ninth International Conference, page. 1466 - 1469
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제정호JE, JUNG HO
Dept of Materials Science & Enginrg
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