Conference
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이시우 | - |
| dc.date.accessioned | 2018-06-24T13:14:54Z | - |
| dc.date.available | 2018-06-24T13:14:54Z | - |
| dc.date.created | 2009-03-27 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/91301 | - |
| dc.publisher | 반도체 학술대회 | - |
| dc.relation.isPartOf | 반도체 학술대회 | - |
| dc.relation.isPartOf | 반도체 학술대회 초록집(p511) | - |
| dc.title | Nano-composite Dual Phase Low-k SiCOH/CxHy Films by Plasma Chemical Vapor Deposition with VTMS(vinyltrimethylsilane) | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.identifier.bibliographicCitation | 반도체 학술대회 | - |
| dc.citation.conferenceDate | 2002-02-21 | - |
| dc.citation.title | 반도체 학술대회 | - |
| dc.contributor.affiliatedAuthor | 이시우 | - |
| dc.description.journalClass | 2 | - |
| dc.description.journalClass | 2 | - |
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