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Atomic Layer Deposition of Zirconium Silicate Films Using Chloride and Alkoxide Compounds

Title
Atomic Layer Deposition of Zirconium Silicate Films Using Chloride and Alkoxide Compounds
Authors
이시우
Publisher
AVS
URI
https://oasis.postech.ac.kr/handle/2014.oak/91300
Article Type
Conference
Citation
Proc. of AVS Topical Conference(ALD 2002)
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