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Atomic Layer Deposition of Zirconium Silicate Films Using Zirconium Tetrachloride and Tetra-n-butyl Orthosilicate
- Title
- Atomic Layer Deposition of Zirconium Silicate Films Using Zirconium Tetrachloride and Tetra-n-butyl Orthosilicate
- Authors
- 이시우
- Publisher
- American Vacuum Society
- Article Type
- Conference
- Citation
- AVS 49th International Symposium(thin film session)
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