Conference
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Nano-composite Low-k SiCOH Films by Plasma Enhanced Chemical Vapor Deposition with VTMS (vinyltrimethylsilane)
- Title
- Nano-composite Low-k SiCOH Films by Plasma Enhanced Chemical Vapor Deposition with VTMS (vinyltrimethylsilane)
- Authors
- 이시우
- Publisher
- 한국반도체 학술대회
- Article Type
- Conference
- Citation
- 제 10회 한국반도체 학술대회, page. 701
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.