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Low-k SiCOH Films by Plasma Enhanced Chemical Vapor Deposition using Divinyldimethylsilane

Title
Low-k SiCOH Films by Plasma Enhanced Chemical Vapor Deposition using Divinyldimethylsilane
Authors
이시우
Publisher
한국화학공학회
URI
https://oasis.postech.ac.kr/handle/2014.oak/91256
Article Type
Conference
Citation
2004년 화학공학회/공업화학회 공동 학술대회
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