Low-k SiCOH Films by Plasma Enhanced Chemical Vapor Deposition using Divinyldimethylsilane
- Title
- Low-k SiCOH Films by Plasma Enhanced Chemical Vapor Deposition using Divinyldimethylsilane
- Authors
- 이시우
- Publisher
- 한국화학공학회
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/91256
- Article Type
- Conference
- Citation
- 2004년 화학공학회/공업화학회 공동 학술대회
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