Conference
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이시우 | - |
| dc.date.accessioned | 2018-06-24T13:11:25Z | - |
| dc.date.available | 2018-06-24T13:11:25Z | - |
| dc.date.created | 2009-03-27 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/91247 | - |
| dc.publisher | The Asia-Pacific chemical reaction engineering working party | - |
| dc.relation.isPartOf | The 4th Asia-Pacific Chemical Reaction Engineering Symposium (APCRE'05) | - |
| dc.relation.isPartOf | The 4th Asia-Pacific chemical reaction engineering symposium | - |
| dc.title | Atomic layer deposition of hafnium silicate thin films using a novel single precursor | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.identifier.bibliographicCitation | The 4th Asia-Pacific Chemical Reaction Engineering Symposium (APCRE'05) | - |
| dc.citation.conferenceDate | 2005-06-12 | - |
| dc.citation.title | The 4th Asia-Pacific Chemical Reaction Engineering Symposium (APCRE'05) | - |
| dc.contributor.affiliatedAuthor | 이시우 | - |
| dc.description.journalClass | 1 | - |
| dc.description.journalClass | 1 | - |
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