Conference
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김오현 | - |
| dc.date.accessioned | 2018-06-24T12:47:14Z | - |
| dc.date.available | 2018-06-24T12:47:14Z | - |
| dc.date.created | 2009-03-27 | - |
| dc.date.issued | 1990-05-01 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/90902 | - |
| dc.relation.isPartOf | The Electro-Chemical Society Meeting | - |
| dc.relation.isPartOf | The Electro-Chemical Society Meeting | - |
| dc.title | Effects of various pre-intrinsic and phosphorus gettering treatments upon quality of neat surface region in CZ silicon wafer during a simulated 4 MB DRAM process | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.identifier.bibliographicCitation | The Electro-Chemical Society Meeting | - |
| dc.citation.title | The Electro-Chemical Society Meeting | - |
| dc.contributor.affiliatedAuthor | 김오현 | - |
| dc.description.journalClass | 1 | - |
| dc.description.journalClass | 1 | - |
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Related Researcher
- 김오현KIM, OHYUN
- Dept of Electrical Enginrg