Conference
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Remote plasma enhanced metal organic chemical vapor deposition of TiN for diffusion barrier
- Title
- Remote plasma enhanced metal organic chemical vapor deposition of TiN for diffusion barrier
- Authors
- 이시우
- Publisher
- Key Tech.
- Article Type
- Conference
- Citation
- Proc. of 2nd Korean-Japan Symposium on Adv. Mater
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.