In-situ FT-IR Diagnostics of Atomic Layer Deposition Process
- Title
- In-situ FT-IR Diagnostics of Atomic Layer Deposition Process
- Authors
- 이시우
- Publisher
- Materials Division Korean Institute of Chemical Engineers
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/90560
- Article Type
- Conference
- Citation
- The 3rd symposium on nano chemical processing
- Files in This Item:
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